Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10607817 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Philip Allan Kraus | 2020-03-31 | $21,055,000 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 | $50,821,000 |