Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607817 | Thermal repeatability and in-situ showerhead temperature monitoring | Timothy Joseph Franklin, Philip Allan Kraus | 2020-03-31 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2020-01-14 |