Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877099 | Method and device for testing battery equalization circuit | Qianhui ZHANG, Liguo Yan, Xingquan Qin, Zhongke Yang, Huigen YU +3 more | 2020-12-29 |
| 10790180 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more | 2020-09-29 |
| 10712267 | Cleaning-performance evaluation system | Koji Kawasaki, Haruka Hutamura, Yukihiro Yazaki, Tsukasa Kitano | 2020-07-14 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Phillip R. Sommer, Dan Marohl | 2020-01-14 |