Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658223 | Apparatus for prevention of backside deposition in a spatial ALD process chamber | Joseph Yudovsky | 2020-05-19 |
AP
Alexander S. Polyak
Overall (2020): #554,381 of 565,922Top 100%
1
Patents 2020