Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854425 | Feedforward temperature control for plasma processing apparatus | Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar, Duy D. Nguyen +7 more | 2020-12-01 |
| 10578977 | On-board supply system for a stage assembly | Johnathan Agustin Marquez, Joseph P. Rossi | 2020-03-03 |