Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811226 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | James D. Carducci, Kenneth S. Collins, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf | 2020-10-20 |
| 10780447 | Apparatus for controlling temperature uniformity of a showerhead | Silverst Rodrigues, James D. Carducci | 2020-09-22 |
| 10537013 | Distributed electro-static chuck cooling | Fernando Silveira, Hamid Tavassoli | 2020-01-14 |