Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811226 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | James D. Carducci, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2020-10-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811226 | Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates | James D. Carducci, Kenneth S. Collins, Richard Fovell, Kartik Ramaswamy, Shahid Rauf | 2020-10-20 |