| 10811226 |
Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates |
Kenneth S. Collins, Richard Fovell, Jason A. Kenney, Kartik Ramaswamy, Shahid Rauf |
2020-10-20 |
| 10780447 |
Apparatus for controlling temperature uniformity of a showerhead |
Richard Fovell, Silverst Rodrigues |
2020-09-22 |
| 10615004 |
Distributed electrode array for plasma processing |
Kenneth S. Collins, Michael R. Rice, Kartik Ramaswamy, Yue Guo, Olga Regelman |
2020-04-07 |
| 10615006 |
Symmetric plasma process chamber |
Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-04-07 |
| 10580620 |
Symmetric plasma process chamber |
Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-03-03 |
| 10546728 |
Symmetric plasma process chamber |
Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-01-28 |
| 10535502 |
Symmetric plasma process chamber |
Hamid Tavassoli, Ajit Balakrishna, Zhigang Chen, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more |
2020-01-14 |
