Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847386 | Method of forming a bulk article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-11-24 |
| 10840112 | Coated article and semiconductor chamber apparatus formed from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-11-17 |
| 10840113 | Method of forming a coated article and semiconductor chamber apparatus from yttrium oxide and zirconium oxide | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-11-17 |
| 10622194 | Bulk sintered solid solution ceramic which exhibits fracture toughness and halogen plasma resistance | Jennifer Y. Sun, Ren-Guan Duan, Jie Yuan, Kenneth S. Collins | 2020-04-14 |