Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770346 | Selective cobalt removal for bottom up gapfill | Jianxin Lei, Nitin K. Ingle, Roey Shaviv | 2020-09-08 |
| 10727080 | Tantalum-containing material removal | Naomi Yoshida, Soumendra N. Barman, Nitin K. Ingle | 2020-07-28 |
| 10699953 | Method for creating a fully self-aligned via | Amrita B. Mullick, Nitin K. Ingle, Regina Freed, Uday Mitra, Ho-yung David Hwang | 2020-06-30 |
| 10658161 | Method and apparatus for reducing particle defects in plasma etch chambers | Andrew Nguyen, Changhun Lee, Xiaoming He, Meihua Shen | 2020-05-19 |