Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615034 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high K at channel | Bo Zheng, Avgerinos V. Gelatos, Anshul Ashok Vyas | 2020-04-07 |
| 10586707 | Selective deposition of metal silicides | Namsung Kim, Srinivas D. Nemani, Ellie Yieh, Jong Hun Choi, Christopher Ahles +1 more | 2020-03-10 |