Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777405 | Drying process for high aspect ratio features | Roman Gouk, Han-Wen Chen, Steven Verhaverbeke | 2020-09-15 |
| 10685830 | Condenser system for high pressure processing system | — | 2020-06-16 |
| 10643867 | Annealing system and method | Charles T. Carlson, Robert Brent Vopat | 2020-05-05 |
| 10636677 | High pressure and high temperature anneal chamber | Steven Verhaverbeke, Kurtis Leschkies | 2020-04-28 |
| 10573510 | Substrate support and baffle apparatus | Roman Gouk, Han-Wen Chen, Steven Verhaverbeke | 2020-02-25 |