Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10774423 | Tunable ground planes in plasma chambers | Karthik Janakiraman, Juan Carlos Rocha-Alvarez, Mark Fodor, Dale R. Du Bois, Amit Kumar BANSAL +4 more | 2020-09-15 |
| 10570517 | Apparatus and method for UV treatment, chemical treatment, and deposition | Amit Kumar BANSAL, Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Sanjeev Baluja, Scott A. Hendrickson | 2020-02-25 |