Issued Patents 2020
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879041 | Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers | Zheng John Ye, Abdul Aziz Khaja, Amit Kumar BANSAL, Kwangduk Douglas Lee, Xing Lin +2 more | 2020-12-29 |
| 10858735 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jason Michael Lamb, Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua | 2020-12-08 |
| 10811301 | Dual-zone heater for plasma processing | Xing Lin, Jianhua Zhou, Ramprakash Sankarakrishnan | 2020-10-20 |
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10774423 | Tunable ground planes in plasma chambers | Karthik Janakiraman, Thomas Nowak, Mark Fodor, Dale R. Du Bois, Amit Kumar BANSAL +4 more | 2020-09-15 |
| 10720349 | Temperature measurement in multi-zone heater | Dale R. Du Bois, Bozhi Yang, Jianhua Zhou, Sanjeev Baluja, Amit Kumar BANSAL | 2020-07-21 |
| 10711350 | Alumina layer formation on aluminum surface to protect aluminum parts | Ren-Guan Duan, Jianhua Zhou | 2020-07-14 |
| 10692703 | Ceramic heater with enhanced RF power delivery | Xing Lin, Jianhua Zhou, Ningli Liu | 2020-06-23 |
| 10669629 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2020-06-02 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10599043 | Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components | Hiroyuki Ogiso, Jianhua Zhou, Zonghui SU, Jeongmin Lee, Karthik Thimmavajjula Narasimha +4 more | 2020-03-24 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2020-03-03 |
| 10570517 | Apparatus and method for UV treatment, chemical treatment, and deposition | Amit Kumar BANSAL, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Thomas Nowak | 2020-02-25 |
| 10544508 | Controlling temperature in substrate processing systems | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan | 2020-01-28 |