Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879041 | Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers | Zheng John Ye, Amit Kumar BANSAL, Kwangduk Douglas Lee, Xing Lin, Jianhua Zhou +2 more | 2020-12-29 |
| 10811325 | Self-healing semiconductor wafer processing | — | 2020-10-20 |
| 10663491 | Voltage-current probe for measuring radio-frequency electrical power in a high-temperature environment and method of calibrating the same | Zheng John Ye, Jay D. Pinson, II, Juan Carlos Rocha | 2020-05-26 |
| 10636630 | Processing chamber and method with thermal control | Hemant P. Mungekar, Ganesh Balasubramanian, Yoichi Suzuki | 2020-04-28 |
| 10629427 | Bevel etch profile control | Zonghui SU, Vinay Prabhakar, Jeongmin Lee | 2020-04-21 |
| 10599043 | Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components | Hiroyuki Ogiso, Jianhua Zhou, Zonghui SU, Juan Carlos Rocha-Alvarez, Jeongmin Lee +4 more | 2020-03-24 |