Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777394 | Virtual sensor for chamber cleaning endpoint | William Michael Pryor, Zhijun Jiang | 2020-09-15 |
| 10636630 | Processing chamber and method with thermal control | Ganesh Balasubramanian, Yoichi Suzuki, Abdul Aziz Khaja | 2020-04-28 |