Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Juan Carlos Rocha-Alvarez +17 more | 2020-10-06 |
| 10777394 | Virtual sensor for chamber cleaning endpoint | Hemant P. Mungekar, William Michael Pryor | 2020-09-15 |
| 10600624 | System and method for substrate processing chambers | Kalyanjit Ghosh, Sanjeev Baluja, Mayur Govind Kulkarni, Shailendra Srivastava, Tejas Ulavi +9 more | 2020-03-24 |
| 10553427 | Low dielectric constant oxide and low resistance OP stack for 3D NAND application | Xinhai Han, Kang Sub Yim, Deenesh Padhi | 2020-02-04 |