Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879041 | Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers | Zheng John Ye, Abdul Aziz Khaja, Amit Kumar BANSAL, Kwangduk Douglas Lee, Jianhua Zhou +2 more | 2020-12-29 |
| 10811301 | Dual-zone heater for plasma processing | Jianhua Zhou, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan | 2020-10-20 |
| 10770328 | Substrate support with symmetrical feed structure | Douglas A. Buchberger, Jr., Xiaoping Zhou, Andrew Nguyen, Anchel Sheyner | 2020-09-08 |
| 10692703 | Ceramic heater with enhanced RF power delivery | Jianhua Zhou, Ningli Liu, Juan Carlos Rocha-Alvarez | 2020-06-23 |