Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734232 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2020-08-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734232 | Deposition of metal silicide layers on substrates and chamber components | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Milind Gadre, Xiaoquan Min, Paul Connors | 2020-08-04 |