Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840086 | Plasma enhanced CVD with periodic high voltage bias | Kelvin Chan, Travis Koh, Philip Allan Kraus | 2020-11-17 |
| 10763143 | Processing tool having a monitoring device | Shimin Mao, Ashish Goel, Anantha K. Subramani, Philip Allan Kraus | 2020-09-01 |