Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D902165 | Target profile for a physical vapor deposition chamber target | William Johanson, Prashant Prabhakar Prabhu | 2020-11-17 |
| 10763090 | High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this process | Adolph Miller Allen, Lara Hawrylchak, Zhigang Xie, Muhammad M. Rasheed, Rongjun Wang +8 more | 2020-09-01 |
| D894137 | Target profile for a physical vapor deposition chamber target | William Johanson, Anthony Chih-Tung Chan, Siew Kit Hoi, Prashant Prabhakar Prabhu | 2020-08-25 |
| D888903 | Deposition ring for physical vapor deposition chamber | David Gunther, Cheng-Hsiung Tsai | 2020-06-30 |
| 10648071 | Process kit having a floating shadow ring | William Johanson, Siew Kit Hoi, John Mazzocco, Prashant Prabhakar Prabhu | 2020-05-12 |
| D877101 | Target profile for a physical vapor deposition chamber target | William Johanson, Prashant Prabhakar Prabhu | 2020-03-03 |
| 10546733 | One-piece process kit shield | Ryan Edwin Hanson, Ruxiao An | 2020-01-28 |