Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10648071 | Process kit having a floating shadow ring | William Johanson, Siew Kit Hoi, Kirankumar Neelasandra SAVANDAIAH, Prashant Prabhakar Prabhu | 2020-05-12 |
| 10573498 | Substrate processing apparatus including annular lamp assembly | Bharath Swaminathan, Hanbing Wu | 2020-02-25 |