Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10704139 | Plasma chamber target for reducing defects in workpiece during dielectric sputtering | Xiaodong Wang, Rongjun Wang | 2020-07-07 |
| 10573498 | Substrate processing apparatus including annular lamp assembly | Bharath Swaminathan, John Mazzocco | 2020-02-25 |