Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10815561 | Method and apparatus for asymmetric selective physical vapor deposition | Joung Joo Lee, Bencherki Mebarki, Xianmin Tang, Keith A. Miller, Sudarsan Srinivasan | 2020-10-27 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Sang-Hyeob Lee, Thomas Jongwan Kwon, Jaesoo Ahn +2 more | 2020-07-14 |
| 10707122 | Methods for depositing dielectric barrier layers and aluminum containing etch stop layers | Kevin Moraes, Srinivas Guggilla, He Ren, Mehul Naik, David Thompson +6 more | 2020-07-07 |
| 10559578 | Deposition of cobalt films with high deposition rate | Jacqueline S. Wrench, Jing Zhou, Fuqun Grace Vasiknanonte, Jiang Lu, Paul F. Ma +3 more | 2020-02-11 |