Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879081 | Methods of reducing or eliminating defects in tungsten film | Guoqiang Jian, Wei V. Tang, Chi-Chou Lin, Paul F. Ma, Kai Wu +4 more | 2020-12-29 |
| 10559578 | Deposition of cobalt films with high deposition rate | Jacqueline S. Wrench, Fuqun Grace Vasiknanonte, Jiang Lu, Paul F. Ma, Nobuyuki Sasaki +3 more | 2020-02-11 |