Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861693 | Cleaning method | Peter Stone, Christopher S. Olsen, Teng-Fang Kuo, Ping Han Hsieh | 2020-12-08 |
| 10679885 | Substrate support assembly with deposited surface features | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Teng-Fang Kuo | 2020-06-09 |