| 10870911 |
High pressure ammonia nitridation of tunnel oxide for 3DNAND applications |
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2020-12-22 |
| 10861693 |
Cleaning method |
Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Zhenwen Ding |
2020-12-08 |
| 10847337 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2020-11-24 |
| 10837122 |
Method and apparatus for precleaning a substrate surface prior to epitaxial growth |
Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more |
2020-11-17 |
| 10767471 |
Resource density screening tool |
Andrew Dewhurst, Gerald E. Michael, Anita E. Csoma, Arijit Mitra |
2020-09-08 |
| 10714333 |
Apparatus and method for selective oxidation at lower temperature using remote plasma source |
Heng Pan, Matthew S. Rogers, Agus Sofian Tjandra |
2020-07-14 |
| 10636626 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Vishwas Kumar Pandey, Kartik Shah, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
2020-04-28 |
| 10636650 |
Argon addition to remote plasma oxidation |
Hansel LO, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more |
2020-04-28 |
