Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Taewan Kim +1 more | 2020-11-24 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Eric Kihara Shono +1 more | 2020-04-28 |
| 10636650 | Argon addition to remote plasma oxidation | Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2020-04-28 |