Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more | 2020-11-24 |
| 10714333 | Apparatus and method for selective oxidation at lower temperature using remote plasma source | Heng Pan, Matthew S. Rogers, Christopher S. Olsen | 2020-07-14 |
| 10689757 | Gas injection apparatus with heating channels | Lara Hawrylchak, Emre Cuvalci | 2020-06-23 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more | 2020-04-28 |
| 10600641 | Silicon germanium selective oxidation process | — | 2020-03-24 |