| 10847337 |
Side inject designs for improved radical concentrations |
Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more |
2020-11-24 |
| 10808310 |
Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber |
Kartik Shah, Edric Tong, Prashanth Vasudeva |
2020-10-20 |
| 10685821 |
Physical vapor deposition processing systems target cooling |
Sanjay Bhat, Vibhu Jindal |
2020-06-16 |
| 10636626 |
Dogbone inlet cone profile for remote plasma oxidation chamber |
Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more |
2020-04-28 |
| 10619235 |
Effective and novel design for lower particle count and better wafer quality by diffusing the flow inside the chamber |
Kartik Shah, Edric Tong, Prashanth Vasudeva |
2020-04-14 |
