Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636650 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Erika HANSEN, Taewan Kim +1 more | 2020-04-28 |
| 10580643 | Fluorination during ALD high-k, fluorination post high-k and use of a post fluorination anneal to engineer fluorine bonding and incorporation | Linlin Wang, Wei Liu | 2020-03-03 |