Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2020-11-17 |
| 10573719 | Horizontal gate all around device isolation | Shiyu Sun, Naomi Yoshida, Sung Won Jun, Benjamin Colombeau, Michael Chudzik | 2020-02-25 |