Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861693 | Cleaning method | Christopher S. Olsen, Teng-Fang Kuo, Ping Han Hsieh, Zhenwen Ding | 2020-12-08 |
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Chi-Wei Lo +1 more | 2020-11-17 |