Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone +1 more | 2020-11-17 |
| 10797133 | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures | Alexandros T. Demos, Raj Kumar | 2020-10-06 |