Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Christopher S. Olsen, Theresa Kramer Guarini, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2020-11-17 |
| 10626500 | Showerhead design | Kartik Shah, Chaitanya A. PRASAD, Kevin Joseph Bautista, Umesh M. Kelkar, Lara Hawrylchak | 2020-04-21 |
| 10535513 | Apparatus and methods for backside passivation | Lara Hawrylchak | 2020-01-14 |
| 10529541 | Inductive plasma source with metallic shower head using B-field concentrator | Canfeng Lai, Peter I. Porshnev, Jose Antonio Marin | 2020-01-07 |