Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529541 | Inductive plasma source with metallic shower head using B-field concentrator | Canfeng Lai, Jeffrey Tobin, Jose Antonio Marin | 2020-01-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10529541 | Inductive plasma source with metallic shower head using B-field concentrator | Canfeng Lai, Jeffrey Tobin, Jose Antonio Marin | 2020-01-07 |