Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10797133 | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures | Chi-Wei Lo, Alexandros T. Demos | 2020-10-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10797133 | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures | Chi-Wei Lo, Alexandros T. Demos | 2020-10-06 |