Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Tae Won Kim, Dmitry Lubomirsky, Xiao-Ming He +2 more | 2020-08-25 |
| 10573497 | Multi-layer plasma resistant coating by atomic layer deposition | David Fenwick, Jennifer Y. Sun, Guodong Zhan | 2020-02-25 |
| 10563303 | Metal oxy-flouride films based on oxidation of metal flourides | David Fenwick, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice | 2020-02-18 |