Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Dmitry Lubomirsky, Xiaowei Wu, Xiao-Ming He +2 more | 2020-08-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Dmitry Lubomirsky, Xiaowei Wu, Xiao-Ming He +2 more | 2020-08-25 |