Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573497 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2020-02-25 |
| 10563303 | Metal oxy-flouride films based on oxidation of metal flourides | Xiaowei Wu, Guodong Zhan, Jennifer Y. Sun, Michael R. Rice | 2020-02-18 |