Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847347 | Edge ring assembly for a substrate support in a plasma processing chamber | Hamid Noorbakhsh, Anwar Husain | 2020-11-24 |
| 10636629 | Split slit liner door | Hamid Noorbakhsh | 2020-04-28 |