Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784089 | Temperature and bias control of edge ring | James Rogers, Rajinder Dhindsa | 2020-09-22 |
| 10763081 | Apparatus and methods for manipulating radio frequency power at an edge ring in plasma process device | James Rogers | 2020-09-01 |