Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10589397 | Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing | Alain Duboust, Wen-Chiang Tu, Jimin Zhang, Ingemar Carlsson, Boguslaw A. Swedek +4 more | 2020-03-17 |
| 10562148 | Real time profile control for chemical mechanical polishing | Kun Xu, Tzu-Yu Liu | 2020-02-18 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2020-02-11 |