Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858727 | High density, low stress amorphous carbon film, and process and equipment for its deposition | Jingjing Liu, Zhong Qiang Hua, Adolph Miller Allen, Michael W. Stowell, Srinivas D. Nemani +3 more | 2020-12-08 |
| 10570506 | Method to improve film quality for PVD carbon with reactive gas and bias power | Bhargav S. Citla, Jingjing Liu, Zhong Qiang Hua, Srinivas D. Nemani, Ellie Yieh | 2020-02-25 |