Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607870 | Substrate carrier for active/passive bonding and de-bonding of a substrate | Sriskantharajah Thirunavukarasu | 2020-03-31 |
| 10549324 | Method and apparatus for backside cleaning of substrates | Sriskantharajah Thirunavukarasu, Arvind Sundarrajan, Srinivas D. Nemani | 2020-02-04 |