Issued Patents 2020
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847400 | Adhesive-less substrate bonding to carrier plate | Arvind Sundarrajan, Karrthik Parathithasan, Qi Jie Peng, Manorajh Arunakiri | 2020-11-24 |
| 10784134 | Image based substrate mapper | Eng Sheng Peh, Karthik Balakrishnan | 2020-09-22 |
| 10777442 | Hybrid substrate carrier | Shoju Vayyapron, ANAND MAHADEV, Shankeerthan Kalyanasundaram, Eng Sheng Peh | 2020-09-15 |
| 10607870 | Substrate carrier for active/passive bonding and de-bonding of a substrate | Jen Sern Lew | 2020-03-31 |
| 10566226 | Multi-cassette carrying case | Eng Sheng Peh, Srinivas D. Nemani, Arvind Sundarrajan, Avinash Avula, Ellie Yieh +2 more | 2020-02-18 |
| 10549324 | Method and apparatus for backside cleaning of substrates | Jen Sern Lew, Arvind Sundarrajan, Srinivas D. Nemani | 2020-02-04 |