Issued Patents All Time
Showing 26–50 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10875060 | Method and apparatus for removing debris from collector | Shang-Ying WU, Ming-Hsun Tsai, Sheng-Kang Yu, Yung-Teng Yu, Chi-Ming Yang +3 more | 2020-12-29 |
| 10775842 | Portable electronic device | Chi-Zen Peng, Ting-Yuan Lin | 2020-09-15 |
| 10746190 | Fan module | Chi-Zen Peng, Chia-Ju Ho, Meng-Lung Chiang | 2020-08-18 |
| 10718718 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2020-07-21 |
| 10719020 | Droplet generator and method of servicing extreme ultraviolet radiation source apparatus | Yen-Hsun Chen, Ming-Hsun Tsai, Shao-Hua Wang, Han-Lung Chang, Li-Jui Chen | 2020-07-21 |
| 10694621 | Image capturing assembly and electronic device including the same | Chi-Zen Peng, Pin-Chang Chu, Ting-Yuan Lin | 2020-06-23 |
| 10684552 | Method to mitigate defect printability for ID pattern | Yen-Cheng Lu, Chia-Hao Hsu, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2020-06-16 |
| 10684559 | Apparatus and method for cleaning reticle stage | Yu-Fu Lin, Tung-Jung Chang | 2020-06-16 |
| 10613592 | Bendable device | Pin-Chang Chu, Chin-Yao Hsu, Cheng-Tai Ho | 2020-04-07 |
| 10511310 | Oven controlled crystal oscillator consisting of heater-embedded ceramic package | Chien-Wei Chiang, Wan-Lin Hsieh, Chia-Wei Chen, CHE-LUNG HSU, Sheng-Hsiang Kao +1 more | 2019-12-17 |
| 10459353 | Lithography system with an embedded cleaning module | Shang-Chieh Chien, Jeng-Horng Chen, Jui-Ching Wu, Hung-Chang Hsieh, Chi-Lun Lu +3 more | 2019-10-29 |
| 10429314 | EUV vessel inspection method and related system | Chun-Lin Chang, Shang-Chieh Chien, Shang-Ying WU, Li-Kai Cheng, Tzung-Chi Fu +4 more | 2019-10-01 |
| D853195 | Water kettle | — | 2019-07-09 |
| 10325406 | Image synthesis method and image synthesis device for virtual object | Shang-Yi Lin, Chen-Hao Wei | 2019-06-18 |
| 10291236 | Oven controlled crystal oscillator consisting of heater-embedded ceramic package | Chien-Wei Chiang, Wan-Lin Hsieh, Chia-Wei Chen, CHE-LUNG HSU, Sheng-Hsiang Kao +1 more | 2019-05-14 |
| 10274838 | System and method for performing lithography process in semiconductor device fabrication | Jui-Ching Wu, Jeng-Horng Chen, Shu-Hao Chang, Shang-Chieh Chien, Ming-Chin Chien +1 more | 2019-04-30 |
| 10156794 | Positioning device for aligning semiconductor tool and overhead hoist transport system | Sheng-Kang Yu, Yu-Fu Lin | 2018-12-18 |
| 10067418 | Particle removal system and method thereof | Shu-Hao Chang, Chi-Lun Lu, Shang-Chieh Chien, Ming-Chin Chien, Jui-Ching Wu +2 more | 2018-09-04 |
| 9964850 | Method to mitigate defect printability for ID pattern | Yen-Cheng Lu, Chia-Hao Hsu, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2018-05-08 |
| 9869934 | Collector in an extreme ultraviolet lithography system with optimal air curtain protection | Chia-Ching Huang, Tsung-Yu Chen, Chia-Hao Hsu, Shinn-Sheng Yu | 2018-01-16 |
| 9823585 | EUV focus monitoring systems and methods | Chih-Tsung Shih, Chieh-Jen Cheng, Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen +1 more | 2017-11-21 |
| 9735065 | Systems and methods of local focus error compensation for semiconductor processes | Chia-Hao Hsu, Pei-Cheng Hsu, Chia-Ching Huang, Chih-Ming Chen | 2017-08-15 |
| 9665007 | Rotary EUV collector | Shang-Chieh Chien, Shu-Hao Chang, Jui-Ching Wu, Tsung-Yu Chen, Tzu-Hsiang Chen +2 more | 2017-05-30 |
| 9618856 | Method of overlay in extreme ultra-violet (EUV) lithography | Chia-Ching Huang, Chia-Hao Hsu | 2017-04-11 |
| 9612523 | Structure and method for reflective-type mask | Chih-Tsung Shih, Chi-Lun Lu, Jeng-Horng Chen, Shinn-Sheng Yu, Anthony Yen +1 more | 2017-04-04 |