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Qingqing Zhu |
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Profile shaping for control gate recesses |
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Systems and methods of seasoning electrostatic chucks with dielectric seasoning films |
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PECVD process |
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Vivien Chua, Prashant Kumar Kulshreshtha, Fang Ruan, Diwakar Kedlaya |
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Method of forming film stacks with reduced defects |
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PECVD process |
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Virtual sensor for chamber cleaning endpoint |
Hemant P. Mungekar, William Michael Pryor |
2020-09-15 |
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Low dielectric constant oxide and low resistance OP stack for 3D NAND application |
Xinhai Han, Kang Sub Yim, Deenesh Padhi |
2020-02-04 |
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Dual-channel showerhead for formation of film stacks |
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| 10060032 |
PECVD process |
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PECVD apparatus and process |
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PECVD process |
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2017-11-14 |
| 9458537 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Juan Carlos Rocha-Alvarez +17 more |
2016-10-04 |
| 9157730 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Juan Carlos Rocha-Alvarez +17 more |
2015-10-13 |
