Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368030 | Deposition method and deposition apparatus | Hitoshi Kato, Yuichiro Sase, Yuji Sawada, Hiroyuki Kikuchi | 2025-07-22 |
| 10793432 | Output inspection method for ozone mass flow controller | — | 2020-10-06 |
| 10472719 | Nozzle and substrate processing apparatus using same | Fumiaki Hayase, Masahiko Kaminishi, Kosuke Takahashi, Hiroko Sasaki, Yu Sasaki | 2019-11-12 |
| 10053776 | Method of detoxifying exhaust pipe and film forming apparatus | Fumiaki Hayase, Masahiko Kaminishi, Kosuke Takahashi, Yu Sasaki, Hiroko Sasaki | 2018-08-21 |
| 9929008 | Substrate processing method and substrate processing apparatus | Fumiaki Hayase, Masahiko Kaminishi, Yu Sasaki, Kosuke Takahashi | 2018-03-27 |
| 9748104 | Method of depositing film | Hiroko Sasaki, Masato Koakutsu | 2017-08-29 |
| 9435026 | Film deposition apparatus | Tomonori Kuwamoto | 2016-09-06 |
| 9418837 | Semiconductor device manufacturing method and substrate treatment system | Koji Akiyama, Hirokazu Higashijima, Chihiro TAMURA, Shintaro Aoyama | 2016-08-16 |
| 9293543 | Film forming method and film forming apparatus | Shuji AZUMO, Yusaku Kashiwagi, Yuichiro Morozumi, Katsushige Harada, Kosuke Takahashi +3 more | 2016-03-22 |
| 9165780 | Plasma processing apparatus and plasma processing method | Akira Shimizu | 2015-10-20 |
| 9103029 | Processing apparatus and film forming method | Yuichiro Morozumi, Izumi Sato, Shinji Asari | 2015-08-11 |
| 9080238 | Raw material supplying device and film forming apparatus | Haruhiko Furuya | 2015-07-14 |
| 8992685 | Substrate processing apparatus, substrate processing method, and computer-readable storage medium | Hitoshi Kato, Manabu Honma, Hiroyuki Kikuchi, Jun Ogawa | 2015-03-31 |
| 8895456 | Method of depositing a film | Mitsuhiro Tachibana, Hiroaki Ikegawa, Muneyuki OTANI, Jun Ogawa, Kosuke Takahashi | 2014-11-25 |
| 8896097 | Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor | Koji Akiyama, Shingo Hishiya, Katsushige Harada | 2014-11-25 |