Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257302 | CVD flowable gap fill | Feng Wang, Victor Lu, Brian Lu, Wai-Fan Yau, Nerissa Draeger +4 more | 2016-02-09 |
| 8809161 | Flowable film dielectric gap fill process | Raashina Humayun, Chi-I Lang, Judy H. Huang, Michael Barnes, Sunil Shanker | 2014-08-19 |
| 8481403 | Flowable film dielectric gap fill process | Raashina Humayun, Chi-I Lang, Judy H. Huang, Michael Barnes, Sunil Shanker | 2013-07-09 |
| 7888233 | Flowable film dielectric gap fill process | Raashina Humayun, Chi-I Lang, Judy H. Huang, Michael Barnes, Sunil Shanker | 2011-02-15 |
| 7524735 | Flowable film dielectric gap fill process | Raashina Humayun, Chi-I Lang, Judy H. Huang, Michael Barnes, Sunil Shanker | 2009-04-28 |
| 7217658 | Process modulation to prevent structure erosion during gap fill | Atiye Bayman, George D. Papasouliotis, Yong Ling, Weijie Zhang, Mayasari Lim | 2007-05-15 |
| 7122485 | Deposition profile modification through process chemistry | George D. Papasouliotis, Edith Goldner, Md Sazzadur Rahman, Vikram Singh | 2006-10-17 |
| 7078312 | Method for controlling etch process repeatability | Siswanto Sutanto, Wenxian Zhu, Waikit Fung, Mayasari Lim, George D. Papasouliotis | 2006-07-18 |
| 7074690 | Selective gap-fill process | Raashina Humayun | 2006-07-11 |
| 7067440 | Gap fill for high aspect ratio structures | Atiye Bayman, Md Sazzadur Rahman, Weijie Zhang, Bart J. van Schravendijk, George D. Papasouliotis +1 more | 2006-06-27 |
| 6867086 | Multi-step deposition and etch back gap fill process | David Chen, Robert Shepherd, George D. Papasouliotis | 2005-03-15 |
| 6846745 | High-density plasma process for filling high aspect ratio structures | George D. Papasouliotis, Raihan M. Tarafdar, Vikram Singh | 2005-01-25 |
| 6787483 | Gap fill for high aspect ratio structures | Atiye Bayman, Md Sazzadur Rahman, Weijie Zhang, Bart Van Schravendijk, George D. Papasoulitotis +1 more | 2004-09-07 |
| 6715498 | Method and apparatus for radiation enhanced supercritical fluid processing | Raashina Humayun, Patrick Joyce, Adrianne K. Tipton | 2004-04-06 |
| 6596654 | Gap fill for high aspect ratio structures | Atiye Bayman, Md Sazzadur Rahman, Weijie Zhang, Bart J. van Schravendijk, George D. Papasoulitotis +1 more | 2003-07-22 |
| 6592695 | Binder system for ceramic arc discharge lamp | Daniel Polis, David C. Dudik | 2003-07-15 |
| 6592804 | Method and apparatus for forming green ceramic arc tubes using pressurized fluid assisted injection molding | — | 2003-07-15 |
| 6531209 | Suspension adhesive for bonding and sealing components in a light source | Daniel Polis | 2003-03-11 |