Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394604 | Plasma source with floating electrodes | Quoc Truong, Dmitry A. Dzilno | 2025-08-19 |
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2024-02-13 |
| 11776793 | Plasma source with ceramic electrode plate | Jared Ahmad Lee, Marc Shull, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno | 2023-10-03 |
| 11262662 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Kyle M. Hanson | 2022-03-01 |
| 11112697 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2021-09-07 |
| 10845715 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Kyle M. Hanson | 2020-11-24 |
| 10837119 | Microelectronic substrate electro processing system | David Silvetti, Paul Z. Wirth, Randy Harris, Daniel J. Woodruff, Gregory J. Wilson | 2020-11-17 |
| 10474033 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2019-11-12 |
| 10401742 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Kyle M. Hanson | 2019-09-03 |
| 10203604 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2019-02-12 |
| 10087544 | Microelectronic substrate electro processing system | David Silvetti, Paul Z. Wirth, Randy Harris | 2018-10-02 |
| 9964863 | Post exposure processing apparatus | Viachslav Babayan, Ludovic Godet, Kyle M. Hanson | 2018-05-08 |
| 9714462 | Vacuum pre-wetting apparatus and methods | Vincent Steffan Francischetti | 2017-07-25 |
| 9399827 | Microelectronic substrate electro processing system | David Silvetti, Paul Z. Wirth, Randy Harris | 2016-07-26 |
| 9245767 | Anneal module for semiconductor wafers | Vincent Steffan Francischetti, Gregory J. Wilson, Kyle M. Hanson, Paul Z. Wirth | 2016-01-26 |
| 7997851 | Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Eric Ruhland, Satish Sundar, Mario David Silvetti | 2011-08-16 |
| 7966210 | Data distribution method and system | Stephen A. Hall, David G. Javdan | 2011-06-21 |
| 7695232 | Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same | Eric Ruhland, Satish Sundar, Mario David Silvetti | 2010-04-13 |
| 7406631 | Method and apparatus for dynamic performance evaluation of data storage systems | — | 2008-07-29 |
| 7134053 | Method and apparatus for dynamic performance evaluation of data storage systems | — | 2006-11-07 |
| 6048472 | Production of synthesis gas by mixed conducting membranes | Shankar Nataraj, Steven Lee Russek | 2000-04-11 |
| 5392594 | Integrated production of fuel gas and oxygenated organic compounds from synthesis gas | William P. Hegarty, David Studer, Edward J. Tirados | 1995-02-28 |
| 5280710 | Continuous process for producing slush hydrogen | Lee S. Gaumer, Jr., Glenn E. Kinard | 1994-01-25 |
| 5220801 | Method and apparatus for maintenance of slush mixture at desired level during melt conditions | David Alexander Butler | 1993-06-22 |